Spiral spring electrostatic actuator for double-layer deformable mirror with continuous phase sheet
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2019
ISSN: 1932-5150
DOI: 10.1117/1.jmm.18.2.025501